Storyboard Text
- 2 Hours Later....
- 2 Hours Later....
- Brush Marks! I just did maintenance on this tool. Maybe I should run some more break-in wafers?
- 2 Hours Later....
- That didn't work, I guess maybe it's bad brushes. I will replace them and see if that works. If it doesn't, I will run even more break-in wafers.
- Next Shift CE....
- Still bad! I better call my lead. Yes, I tried that already. Adjust brush gap? Can you walk me through that? I don't have the procedure here.
- 8 Hours Later....
- Finally, end of shift! Time to create a Service Case. Let's see, Particles, Brush Marks, 8 hours, replaced brushes and verified brush gap. Still down though. Hope the next shift fixes it.
- Hmmm. I will check ARK for brush marks in BU docs or other service cases.... 286 results! Bearing Block assembly, DIW nozzles, Valves, Orings... I will just order it all.. First Come, First Installed.
- 2 Hours Later....
- Darn it! I replaced almost every component and it was just because someone bumped the spray bars while doing the maintenance. Oh, well at least it's working now and the Customer is happy I fixed it.
- 2 Hours Later....
- Brush Marks! I just did maintenance on this tool. Maybe I should run some more break-in wafers?
- Well that didn't work. Good thing we have the Troubleshooting Guide here in the fab. OK, Verify BKM wafer and brush speeds: Check. Verify brush overlaps.. Good thing I have the procedure right here.
- Problem Solved! Someone just bumped the spray bars during the PM. This guide sure got me to a solution quickly and I didn't have to replace any parts! Guess I will create my service case now.
- At the call center....
- Hello Contact Center? My id is 143980, Tool 30840, Issue was Particles. I used Dezide to troubleshoot it. Phone code is A489-394800.
- That's great, I can see every step you did and confirm that the solution was spray bar angle. That feedback will reinforce the guides probabilities. So, how many hours?
- It sure makes a difference to have a path to follow and all the procedures I need right here. Plus filling out my Service Case is so easy. I used to forget half the details by the time I left the fab.
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